JPH0523572Y2 - - Google Patents

Info

Publication number
JPH0523572Y2
JPH0523572Y2 JP1989123063U JP12306389U JPH0523572Y2 JP H0523572 Y2 JPH0523572 Y2 JP H0523572Y2 JP 1989123063 U JP1989123063 U JP 1989123063U JP 12306389 U JP12306389 U JP 12306389U JP H0523572 Y2 JPH0523572 Y2 JP H0523572Y2
Authority
JP
Japan
Prior art keywords
thin film
film thickness
electron
film forming
forming apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989123063U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0363569U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989123063U priority Critical patent/JPH0523572Y2/ja
Publication of JPH0363569U publication Critical patent/JPH0363569U/ja
Application granted granted Critical
Publication of JPH0523572Y2 publication Critical patent/JPH0523572Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1989123063U 1989-10-20 1989-10-20 Expired - Lifetime JPH0523572Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989123063U JPH0523572Y2 (en]) 1989-10-20 1989-10-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989123063U JPH0523572Y2 (en]) 1989-10-20 1989-10-20

Publications (2)

Publication Number Publication Date
JPH0363569U JPH0363569U (en]) 1991-06-20
JPH0523572Y2 true JPH0523572Y2 (en]) 1993-06-16

Family

ID=31671056

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989123063U Expired - Lifetime JPH0523572Y2 (en]) 1989-10-20 1989-10-20

Country Status (1)

Country Link
JP (1) JPH0523572Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4998922B2 (ja) * 2007-08-01 2012-08-15 コクヨ株式会社 綴じ具の取付構造及びファイル

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5397983A (en) * 1977-02-09 1978-08-26 Toshiba Corp Controlling method and apparatus for thickness of vacuum deposited film
JPS61186284A (ja) * 1985-02-13 1986-08-19 Nec Corp 分子線エピタキシ−装置

Also Published As

Publication number Publication date
JPH0363569U (en]) 1991-06-20

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